Equipment

Etching

[300mm] LAM GAMMA Express 3991

型號:[300mm] LAM GAMMA Express 3991
[3991] Novellus GAMMA Express 300mm, Asher, PR Strip, GAMMA 2130, GXT chamber

產品說明

n  Product: GAMMA 2130

n  Condition: Used / SES warehouse, Hsin-chu

n  Process : PR Strip 

1.      System Configuration:

·            Serial No: 3991

·            Vintage : 2004

·            Main System

·            Load Port: Brooks Fixload TM V6

·            EFEM Robot: 02-169208-00

·            Aligner: Yaskawa

·            RF Rack: Generator ENI GHW-50A-04 5ea

·            UI Panel

·            Light Curtain: KEYENCE

·            Signal Cable (RF Cable Included)


2.      Process Chamber Configuration:

·            Express type (upgrade Bell jar and Quartz tube)

·            EPD: 4ea(#2,#3,#4,#5 Port)

·            RF Matcher: CPMX-3000 5ea

·            RF Source: 02-352103-00 5ea

·            Load/Unload Port

·            HDIS Pedestal: #2, #3, #,1, #6

·            Fixed Pedestal: #4, #5

·            Stage #1: Preheat

·            Yaskawa Spindle

·            Athenta Computer

·            UI Computer

·            Gate Valve: MDC ISO Valve

·            Throttle Valve: NC

·            Slit Valve: V-TEX

·            Manometor: MKS 10 Torr

·            Gas Box: MFC #1 Brooks O2, MFC #2 Brooks N2, MFC #3 Brooks H2N2, MFC #4 Brooks CF4